|Document ID (ISN)||67360|
|ISSN - Serial title
||0570-4480 - Journal of the Japan Society for Safety Engineering - Anzen kōgaku
|Convention or series no.
||Accidents in semiconductor industries
||Handōtai kanren sangyō ni okeru jiko rei [in Japanese]|
||15 Dec. 1994, Vol.33, No.6, p.369-375. Illus. 41 ref.
||Accidents that have occurred in the semiconductor industry in Japan are reviewed and summarized in order to clarify hidden hazards in workplaces in the industry. The accidents fall into five categories: silane fires, silane or germane explosions, metallic silicone powder explosions, explosions or violent decompositions of chemical waste and leakage of toxic gases. Analysis of the accidents is followed by suggestions of preventive measures.
||poisoning; occupational accidents; Japan; metal powders; flammable gases; causes of accidents; fire; toxic gases; industrial waste; gas explosions; electronics industry; semiconductor devices
||phosphine; analysis of accident causes; silicon; germane; silane
||D - Periodical articles
|Country / State or Province||Japan|
||Other equipment and plant
|Broad subject area(s)
Manufacturing of electrical appliances and equipment