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Document ID (ISN)67360
CIS number 96-1358
ISSN - Serial title 0570-4480 - Journal of the Japan Society for Safety Engineering - Anzen kōgaku
Year 1994
Convention or series no.
Author(s) Hayashi T.
Title Accidents in semiconductor industries
Original title Handōtai kanren sangyō ni okeru jiko rei [in Japanese]
Bibliographic information 15 Dec. 1994, Vol.33, No.6, p.369-375. Illus. 41 ref.
Abstract Accidents that have occurred in the semiconductor industry in Japan are reviewed and summarized in order to clarify hidden hazards in workplaces in the industry. The accidents fall into five categories: silane fires, silane or germane explosions, metallic silicone powder explosions, explosions or violent decompositions of chemical waste and leakage of toxic gases. Analysis of the accidents is followed by suggestions of preventive measures.
Descriptors (primary) poisoning; occupational accidents; Japan; metal powders; flammable gases; causes of accidents; fire; toxic gases; industrial waste; gas explosions; electronics industry; semiconductor devices
Descriptors (secondary) phosphine; analysis of accident causes; silicon; germane; silane
Document type D - Periodical articles
Country / State or ProvinceJapan
Subject(s) Other equipment and plant
Broad subject area(s) New technologies
Browse category(ies) Fires
Electronics industry
Manufacturing of electrical appliances and equipment
Inorganic substances