Document ID (ISN) | 63325 |
CIS number |
94-2012 |
Year |
1993 |
Convention or series no. |
HSE Specialist Inspector Reports No.43
|
Author(s) |
Cain J.R. Health and Safety Executive, Technology and Health Sciences Division |
Title |
A review of the control of toxic gases within the microelectronic semiconductor manufacturing industry |
Bibliographic information |
HSE Books, PO Box 1999, Sudbury, Suffolk CO10 6FS, United Kingdom, Oct. 1993. vi, 19p. 24 ref. |
Abstract |
This report reviews the use, control and monitoring of hazardous substances within the microelectronic semiconductor manufacturing industry with particular emphasis on certain toxic gases. Contents: the UK industry; the manufacturing process and hazardous substances likely to be encountered; use, control and monitoring of hazardous substances (solvents, acids, alkalis, arsine, phosphine, diborane, silane); biological monitoring; waste disposal of toxic gases; prevention of exposure to toxic gases by substitution. |
Descriptors (primary) |
United Kingdom; semiconductor devices; microelectronics; toxic gases; health engineering; harmful substances |
Descriptors (secondary) |
toxic effects; manufacturing processes; phosphine; report; diborane; silane; arsine; organic solvents; limitation of exposure; substitution; personal protective equipment; determination in air; medical supervision; exposure tests; disposal of harmful waste |
Document type |
E - Books, reports, proceedings |
Country / State or Province | United Kingdom |
Subject(s) |
Toxic and dangerous substances
|
Broad subject area(s) |
Chemical safety
|
Browse category(ies) |
Electronics industry Manufacturing of electrical appliances and equipment
|