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Document ID (ISN)63325
CIS number 94-2012
Year 1993
Convention or series no. HSE Specialist Inspector Reports No.43
Author(s) Cain J.R.
Health and Safety Executive, Technology and Health Sciences Division
Title A review of the control of toxic gases within the microelectronic semiconductor manufacturing industry
Bibliographic information HSE Books, PO Box 1999, Sudbury, Suffolk CO10 6FS, United Kingdom, Oct. 1993. vi, 19p. 24 ref.
Abstract This report reviews the use, control and monitoring of hazardous substances within the microelectronic semiconductor manufacturing industry with particular emphasis on certain toxic gases. Contents: the UK industry; the manufacturing process and hazardous substances likely to be encountered; use, control and monitoring of hazardous substances (solvents, acids, alkalis, arsine, phosphine, diborane, silane); biological monitoring; waste disposal of toxic gases; prevention of exposure to toxic gases by substitution.
Descriptors (primary) United Kingdom; semiconductor devices; microelectronics; toxic gases; health engineering; harmful substances
Descriptors (secondary) toxic effects; manufacturing processes; phosphine; report; diborane; silane; arsine; organic solvents; limitation of exposure; substitution; personal protective equipment; determination in air; medical supervision; exposure tests; disposal of harmful waste
Document type E - Books, reports, proceedings
Country / State or ProvinceUnited Kingdom
Subject(s) Toxic and dangerous substances
Broad subject area(s) Chemical safety
Browse category(ies) Electronics industry
Manufacturing of electrical appliances and equipment