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Document ID (ISN)62901
CIS number 94-1623
ISSN - Serial title 0302-2528 - Siemens-Zeitschrift
Year 1993
Convention or series no.
Author(s) Roos G.
Title Avoidance of health risks in the manufacture of semiconductors
Original title Vermeiden von Gesundheitsrisiken in der Halbleiterfertigung [in German]
Bibliographic information Special-FuE, Fall 1993, p.22-25. Illus.
Abstract The proportion of micronuclei in the lymphocytes of female workers in a semiconductor production plant was determined. The workers were responsible for cleaning and maintenance of the plasma etching reactor and exposed to more than 70 different chemical substances. With 9 to 14 micronuclei per 500 cells the number was above that expected (<8/500 cells). In order to reduce the incidence of micronuclei to <8/500 cells, exhaust hoods were installed, the training of the workers was improved, respirators were distributed for work on the open plasma etching reactor, and the reactor was purged with nitrogen prior to opening.
Descriptors (primary) harmful substances; genetic effects; expectant mothers; microelectronics; electronics industry
Descriptors (secondary) erosion machining; lymphocytes; chemical milling; determination in biological matter; plant safety organization; supply of personal protective equipment; exposure evaluation
Document type D - Periodical articles
Country / State or ProvinceGermany
Subject(s) Toxic and dangerous substances
Broad subject area(s) New technologies
Browse category(ies) Antifertility and prenatal effects
Electronics industry
Manufacturing of electrical appliances and equipment
Genetic factors in reaction to exposures