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CISDOC database

Document ID (ISN)61606
CIS number 94-291
ISSN - Serial title 1047-322X - Applied Occupational and Environmental Hygiene
Year 1992
Convention or series no.
Author(s) Wendt N.C., Mosovsky J.A., Varadi L.
Title High-efficiency particulate air/charcoal filtered vacuum cleaner challenge tests with semiconductor gases and vapors
Bibliographic information July 1992, Vol.7, No.7, p.425-433. Illus. 7 ref.
Abstract High-efficiency particulate air (HEPA) filtered vacuum cleaners have been used for years to clean up toxic particles. Equipped with activated impregnated charcoal, vacuum cleaners have also been used to adsorb toxic vapours such as mercury. The purpose of the tests was to determine a number of parameters relating to the use of special impregnated activated charcoal for removing semi-conductor gases and vapours from the air discharge of a modified off-the-shelf HEPA-filtered vacuum cleaner. Test results were used to determine collection efficiencies as well as studying off-gassing and vapour desorption of challenge materials thought to be present during routine maintenance and servicing of semi-conductor process equipment. Such a modified vacuum cleaner can be effective in scrubbing certain semi-conductor process emissions and can enhance safety during equipment cleaning and servicing.
Descriptors (primary) semiconductor devices; cleaning; toxic gases; toxic substances
Descriptors (secondary) air purification; charcoal; equipment testing; collection efficiency; desorption efficiency; maintenance
Document type D - Periodical articles
Country / State or ProvinceUSA
Subject(s) Toxic and dangerous substances
Broad subject area(s) Chemical safety
Browse category(ies) Cleaning work