Document ID (ISN) | 61606 |
CIS number |
94-291 |
ISSN - Serial title |
1047-322X - Applied Occupational and Environmental Hygiene |
Year |
1992 |
Convention or series no. |
|
Author(s) |
Wendt N.C., Mosovsky J.A., Varadi L. |
Title |
High-efficiency particulate air/charcoal filtered vacuum cleaner challenge tests with semiconductor gases and vapors |
Bibliographic information |
July 1992, Vol.7, No.7, p.425-433. Illus. 7 ref. |
Abstract |
High-efficiency particulate air (HEPA) filtered vacuum cleaners have been used for years to clean up toxic particles. Equipped with activated impregnated charcoal, vacuum cleaners have also been used to adsorb toxic vapours such as mercury. The purpose of the tests was to determine a number of parameters relating to the use of special impregnated activated charcoal for removing semi-conductor gases and vapours from the air discharge of a modified off-the-shelf HEPA-filtered vacuum cleaner. Test results were used to determine collection efficiencies as well as studying off-gassing and vapour desorption of challenge materials thought to be present during routine maintenance and servicing of semi-conductor process equipment. Such a modified vacuum cleaner can be effective in scrubbing certain semi-conductor process emissions and can enhance safety during equipment cleaning and servicing. |
Descriptors (primary) |
semiconductor devices; cleaning; toxic gases; toxic substances |
Descriptors (secondary) |
air purification; charcoal; equipment testing; collection efficiency; desorption efficiency; maintenance |
Document type |
D - Periodical articles |
Country / State or Province | USA |
Subject(s) |
Toxic and dangerous substances
|
Broad subject area(s) |
Chemical safety
|
Browse category(ies) |
Cleaning work
|