ILO Home
Go to the home page
Site map | Contact us Français | Español

CISDOC database

Document ID (ISN)56801
CIS number 91-1669
ISSN - Serial title AUER Mitteilungen
Year 1990
Convention or series no.
Author(s) Brauns U.
Title Gas detection in clean rooms of the microelectronics industry in the context of technology and safety engineering
Original title Gasdetektion für Reinräume der Mikro-Elektronik im technologischen und sicherheitstechnischen Umfeld [in German]
Bibliographic information 1990, No.12, p.13-20. Illus.
Abstract The outlined gas detection system installed in a clean room of a microelectronics plant in Germany comprises: electrochemical hydrogen and other process gas detectors for monitoring room air and waste gas as well as leakage detectors. A central control panel coordinates all detectors, triggers alarm and switches off the gas supply. The gas is transported in double-jacketed pipes.
Descriptors (primary) dangerous substances; hydrogen; clean rooms; alarm systems; detector tubes; fire protection; microelectronics; leakage testing; explosion protection
Descriptors (secondary) description of equipment; protection against leakage
Document type D - Periodical articles
Country / State or ProvinceGermany
Subject(s) Other industries and occupations
Broad subject area(s) Fires, explosions and major hazards
Browse category(ies) Inorganic substances
Manufacturing of electrical appliances and equipment
Electronics industry