| Document ID (ISN) | 56801 |
| CIS number |
91-1669 |
| ISSN - Serial title |
AUER Mitteilungen |
| Year |
1990 |
| Convention or series no. |
|
| Author(s) |
Brauns U. |
| Title |
Gas detection in clean rooms of the microelectronics industry in the context of technology and safety engineering |
| Original title |
Gasdetektion für Reinräume der Mikro-Elektronik im technologischen und sicherheitstechnischen Umfeld [in German] |
| Bibliographic information |
1990, No.12, p.13-20. Illus. |
| Abstract |
The outlined gas detection system installed in a clean room of a microelectronics plant in Germany comprises: electrochemical hydrogen and other process gas detectors for monitoring room air and waste gas as well as leakage detectors. A central control panel coordinates all detectors, triggers alarm and switches off the gas supply. The gas is transported in double-jacketed pipes. |
| Descriptors (primary) |
dangerous substances; hydrogen; clean rooms; alarm systems; detector tubes; fire protection; microelectronics; leakage testing; explosion protection |
| Descriptors (secondary) |
description of equipment; protection against leakage |
| Document type |
D - Periodical articles |
| Country / State or Province | Germany |
| Subject(s) |
Other industries and occupations
|
| Broad subject area(s) |
Fires, explosions and major hazards
|
| Browse category(ies) |
Inorganic substances
Manufacturing of electrical appliances and equipment
Explosions
Fires
Electronics industry
|
