|Document ID (ISN)||56801|
|ISSN - Serial title
|Convention or series no.
||Gas detection in clean rooms of the microelectronics industry in the context of technology and safety engineering
||Gasdetektion für Reinräume der Mikro-Elektronik im technologischen und sicherheitstechnischen Umfeld [in German]|
||1990, No.12, p.13-20. Illus.
||The outlined gas detection system installed in a clean room of a microelectronics plant in Germany comprises: electrochemical hydrogen and other process gas detectors for monitoring room air and waste gas as well as leakage detectors. A central control panel coordinates all detectors, triggers alarm and switches off the gas supply. The gas is transported in double-jacketed pipes.
||dangerous substances; hydrogen; clean rooms; alarm systems; detector tubes; fire protection; microelectronics; leakage testing; explosion protection
||description of equipment; protection against leakage
||D - Periodical articles
|Country / State or Province||Germany|
||Other industries and occupations
|Broad subject area(s)
||Fires, explosions and major hazards
Manufacturing of electrical appliances and equipment