| Document ID (ISN) | 55212 |
| CIS number |
91-167 |
| ISSN - Serial title |
Journal of Industrial Hygiene of Japan - Rōdō eisei kōgaku |
| Year |
1989 |
| Convention or series no. |
|
| Author(s) |
Suzuki M. |
| Title |
Structure and air flow pattern of clean rooms for LSI manufacturing |
| Original title |
Handōtai kurin-rūmu no kōzō to kūki no nagare [in Japanese] |
| Bibliographic information |
June 1989, No.28, p.9-14. Illus. 3 ref. |
| Abstract |
In clean rooms used for LSI manufacturing, it is indispensable to circulate a high volume of air all the time. A clean room, whose ceiling is covered with an air filter and whose floor is perforated, is shaped in such a way as to maintain laminar air flow as much as possible. The relation between clean room structure and accidents caused by process gases, chemicals (acids and solvents), electricity and fire is discussed. The most effective means of accident prevention in clean rooms used is to educate the workers in how to work and how to evacuate the clean room. |
| Descriptors (primary) |
occupational safety; microelectronics; electronics industry; clean rooms |
| Descriptors (secondary) |
escape and exit; causes of accidents; safe working methods |
| Document type |
D - Periodical articles |
| Country / State or Province | Japan |
| Subject(s) |
Other industries and occupations
|
| Broad subject area(s) |
New technologies
|
| Browse category(ies) |
Electronics industry
Manufacturing of electrical appliances and equipment
|
