| Document ID (ISN) | 46591 |
| CIS number |
86-1211 |
| ISSN - Serial title |
0015-2684 - Fire Technology |
| Year |
1986 |
| Convention or series no. |
|
| Author(s) |
Fisher F.L., Williamson R.B., Toms G.L., Crinnion D.M. |
| Title |
Fire protection of flammable work stations in the clean room environment of a microelectronic fabrication facility |
| Bibliographic information |
May 1986, Vol.22, No.2, p.148-165. Illus. 9 ref. |
| Abstract |
An applied engineering programme is described which investigates the fire safety of combustible wet stations used within microelectronic clean room fabrication facilities. The main concern involves the impact of a wet bench fire on the clean room environment of the fabrication facility. The effectiveness of the installed fire detection and suppression systems is discussed as well as the additional steps which should be taken in order to insure early detection and suppression of fires. |
| Descriptors (primary) |
flammable liquids; clean rooms; microelectronics; fire protection; electronics industry; organic solvents |
| Descriptors (secondary) |
description of technique; hazard evaluation |
| Document type |
D - Periodical articles |
| Subject(s) |
Fire and explosions
|
| Broad subject area(s) |
|
| Browse category(ies) |
Manufacturing of electrical appliances and equipment
Fires
Electronics industry
|
