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CISDOC database

Document ID (ISN)53542
CIS number 90-516
ISSN - Serial title 0023-5032 - Air Cleaning - Kūki Seijō
Year 1988
Convention or series no.
Author(s) Kase T.
Title Safety for a semiconductor fabrication facility
Original title Handōtai-seizō-kōjō ni okeru anzentaisaku-shisutemu [in Japanese]
Bibliographic information Oct. 1988, Vol.26, No.3, p.14-33. Illus. 35 ref.
Abstract There are some potential hazards in semiconductor fabrication facilities including health hazards and risks of fire, explosion, air pollution and water pollution. A gaseous or liquid chemical substance may leak from a pipe, a vessel or other process equipment or an unpredictable chemical reaction may occur in an exhaust equipment, such as a duct or a waste gas scrubber. Fail-safe process equipment, hazard detectors and protective equipment are necessary for safety. A cabinet for cylinders of toxic or combustible gas is an example. It is installed with gas flow monitors, automatic cylinder-valve-closers, gas leakage detectors, exhaust ducts, fire detectors and automatic fire extinguishers. In case of emergency, the cylinder valve will be automatically closed and, simultaneously, alarms will go off in the process room and the control room of the facility. Operators must operate equipment in ways that prevent accidents and decrease hazards. A computer-controlled safety system is useful and increases the reliability of the operator who must correctly operate emergency procedures at critical stages.
Descriptors (primary) dangerous substances; safety devices; safety programmes; electronics industry; semiconductor devices
Descriptors (secondary) microelectronics
Document type D - Periodical articles
Subject(s) Other industries and occupations
Broad subject area(s) Industries and occupations
Browse category(ies) Safety devices
Electronics industry
Manufacturing of electrical appliances and equipment
Safety programmes