| Document ID (ISN) | 53542 |
| CIS number |
90-516 |
| ISSN - Serial title |
0023-5032 - Air Cleaning - Kūki Seijō |
| Year |
1988 |
| Convention or series no. |
|
| Author(s) |
Kase T. |
| Title |
Safety for a semiconductor fabrication facility |
| Original title |
Handōtai-seizō-kōjō ni okeru anzentaisaku-shisutemu [in Japanese] |
| Bibliographic information |
Oct. 1988, Vol.26, No.3, p.14-33. Illus. 35 ref. |
| Abstract |
There are some potential hazards in semiconductor fabrication facilities including health hazards and risks of fire, explosion, air pollution and water pollution. A gaseous or liquid chemical substance may leak from a pipe, a vessel or other process equipment or an unpredictable chemical reaction may occur in an exhaust equipment, such as a duct or a waste gas scrubber. Fail-safe process equipment, hazard detectors and protective equipment are necessary for safety. A cabinet for cylinders of toxic or combustible gas is an example. It is installed with gas flow monitors, automatic cylinder-valve-closers, gas leakage detectors, exhaust ducts, fire detectors and automatic fire extinguishers. In case of emergency, the cylinder valve will be automatically closed and, simultaneously, alarms will go off in the process room and the control room of the facility. Operators must operate equipment in ways that prevent accidents and decrease hazards. A computer-controlled safety system is useful and increases the reliability of the operator who must correctly operate emergency procedures at critical stages. |
| Descriptors (primary) |
dangerous substances; safety devices; safety programmes; electronics industry; semiconductor devices |
| Descriptors (secondary) |
microelectronics |
| Document type |
D - Periodical articles |
| Subject(s) |
Other industries and occupations
|
| Broad subject area(s) |
Industries and occupations
|
| Browse category(ies) |
Safety devices
Electronics industry
Manufacturing of electrical appliances and equipment
Safety programmes
|
